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30 Years of atomic force microscopy: Creep, hysteresis, cross-coupling, and vibration problems of piezoelectric tube scanners
Journal article   Peer reviewed

30 Years of atomic force microscopy: Creep, hysteresis, cross-coupling, and vibration problems of piezoelectric tube scanners

H Habibullah
Measurement : journal of the International Measurement Confederation, Vol.159, 107776
15/07/2020
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Abstract

Piezoelectric tube scanner Atomic force microscopy Vibration control
Combined effects of creep, hysteresis, and cross-coupling in the AFM image at 10 Hz using the proposed method and in-built AFM PI controller. •A brief history and applications of an atomic force microscopy. •Problems of a piezoelectric actuator-sensor tube used in a microscopy. •Limiting factors of a piezoelectric scanner for achieving high speed imaging. •Direction for future works in nanopositioning control has been outlined. This paper presents a brief history of scanning probe microscopes (SPMs) and a general insight into an atomic force microscope (AFM), including its operating principles, modes, main components and limitations for achieving high-precision nanopositioning and image scanning. A piezoelectric tube scanner (PTS) is made of a piezoelectric material (PZM) and used in an AFM to position a sample in the sub-nanometric range. As atomic force microscopes (AFMs) are becoming workhorses in investigations in the field of nanometric-range surface profiling of material and biological samples, the high-precision nano-positioning of their PTS is a major requirement for high-speed imaging. The scanning speed of a commercial AFM is limited by the positioning accuracy of its scanner which has the following problems: (i) creep effect in slow-speed scanning; and (ii) hysteresis effect during large-range scanning (which both result in inaccurate reference motion tracking); (iii) cross-coupling effect among the axes of the scanner; and (iv) vibration effect at high frequencies due to its mechanical properties. During the last three decades, high-speed imaging using an AFM has been attempted by applying a suitable controller, using alternative scanning methods or changing the hardware setup.

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