In this paper, we present a spiral scanning method using an atomic force microscope (AFM). Spiral motion is generated by applying slowly varying amplitude sine wave in the X-axis and cosine wave in the Y-axis of the piezoelectric tube (PZT) scanner of the AFM. An LQG controller also designed for damping the resonant mode of a PZT scanner for the lateral positioning of the AFM scanner stage. In this control design, an internal model of the reference sinusoidal signal is introduced with the plant model and an integrator with the system error is introduced. A vibration compensator is also designed and included in feedback loop with the plant to suppress the vibration of the PZT at the resonant frequency. Experimental results demonstrate the effectiveness of the proposed scheme.
Conference proceeding
LQG controller with sinusoidal reference signal modeling for spiral scanning of atomic force microscope
Proceedings of the 2013 8th IEEE Conference on Industrial Electronics and Applications (ICIEA)
Proceedings of the 2013 8th IEEE Conference on Industrial Electronics and Applications (ICIEA) (Melbourne, Australia, 19-21 June)
2013
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Abstract
Details
- Title
- LQG controller with sinusoidal reference signal modeling for spiral scanning of atomic force microscope
- Creators
- H Habibullah - Southern Cross UniversityIan R Petersen - University of New South WalesH R Pota - University of New South WalesM S Rana - University of New South Wales
- Publication Details
- Proceedings of the 2013 8th IEEE Conference on Industrial Electronics and Applications (ICIEA)
- Conference
- Proceedings of the 2013 8th IEEE Conference on Industrial Electronics and Applications (ICIEA) (Melbourne, Australia, 19-21 June)
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE); Piscataway, New Jersey, USA
- Identifiers
- 4476; 991012820372202368
- Academic Unit
- Faculty of Science and Engineering; School of Environment, Science and Engineering
- Resource Type
- Conference proceeding